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NanoVue Deep UV Zoom System
Navitar's Nanovue Deep UV microscopy is relied on more and more by the semiconductor and biomedical industries. Feature sizes on semiconductor wafers, data storage devices, and microelectronic components continue to shrink well below the wavelength of visible light
By developing the NanoVue 248nm 4X Deep UV Zoom lens Navitar responded to the increasing need to further extend resolution limits for optical inspection. The NanoVue optical system works in the deep ultraviolet (DUV) light enabling detection and characterization of yield critical defects while effectively doubling the resolution limit of conventional visible light microscopes.
Using the Deep UV Zoom coupled with one objective, an instrument operator can zoom in on particular details of interest and achieve the exact FOV required while still resolving the important details
→ Inspection sensitivity for 90nm
→ Zoom range of 75X - 300X when coupled with 100X objective
→ 0.15 to 0.037 mm FOV with 2/3" format sensor and 100X objective
→ Optical inspection to under 0.1 um using Deep UV objectives
→ Industry's only Deep UV Zoom solution
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